发明名称 Coated Diamond-Turned Replication Master And Associated Process
摘要 A coated diamond-turned replication master for manufacturing wafer level lens arrays includes a low-hardness diamond-turnable sheet, a mold surface formed in the low-hardness diamond-turnable sheet, and an oxidation-resistant coating formed on the mold surface for protecting same. The mold surface includes a plurality of optical forms, all of which cut therein by a single diamond cutting tool. A process for forming a coated diamond-turned replication master includes a step of forming a mold surface in a low-hardness diamond-turnable sheet using a single diamond cutting tool. The mold surface includes a plurality of optical forms, all of which are formed by the single diamond cutting tool. The process also includes, after the step of forming a plurality of optical forms, coating the mold surface with an oxidation-resistant coating.
申请公布号 US2015115129(A1) 申请公布日期 2015.04.30
申请号 US201414513705 申请日期 2014.10.14
申请人 OmniVision Technologies, Inc. 发明人 Barnes George;Combs Donald;Rickers Michael;Zachary Elizabeth
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项 1. A process for forming a coated diamond-turned replication master, comprising the steps of: forming a mold surface in a low-hardness diamond-turnable sheet using a single diamond cutting tool, the mold surface comprising a plurality of optical forms, all of which are formed by the single diamond cutting tool; and coating the mold surface with an oxidation-resistant coating.
地址 Santa Clara CA US