发明名称 |
Coated Diamond-Turned Replication Master And Associated Process |
摘要 |
A coated diamond-turned replication master for manufacturing wafer level lens arrays includes a low-hardness diamond-turnable sheet, a mold surface formed in the low-hardness diamond-turnable sheet, and an oxidation-resistant coating formed on the mold surface for protecting same. The mold surface includes a plurality of optical forms, all of which cut therein by a single diamond cutting tool. A process for forming a coated diamond-turned replication master includes a step of forming a mold surface in a low-hardness diamond-turnable sheet using a single diamond cutting tool. The mold surface includes a plurality of optical forms, all of which are formed by the single diamond cutting tool. The process also includes, after the step of forming a plurality of optical forms, coating the mold surface with an oxidation-resistant coating. |
申请公布号 |
US2015115129(A1) |
申请公布日期 |
2015.04.30 |
申请号 |
US201414513705 |
申请日期 |
2014.10.14 |
申请人 |
OmniVision Technologies, Inc. |
发明人 |
Barnes George;Combs Donald;Rickers Michael;Zachary Elizabeth |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
1. A process for forming a coated diamond-turned replication master, comprising the steps of:
forming a mold surface in a low-hardness diamond-turnable sheet using a single diamond cutting tool, the mold surface comprising a plurality of optical forms, all of which are formed by the single diamond cutting tool; and coating the mold surface with an oxidation-resistant coating. |
地址 |
Santa Clara CA US |