| 摘要 |
<p>[Problem] To provide a pressure sensor, which does not easily generate peeling of a piezoelectric film due to repeated loading, and has excellent durability. [Solution] This pressure sensor includes a first electrode (11) and a second electrode (12), which have different polarities, and a piezoelectric film (13), which is disposed between the main surface of the first electrode (11), and the main surface of the second electrode (12). The pressure sensor is characterized in that, at least on the main surface of the first electrode (11), the piezoelectric film (13) is deposited, and that an interdiffusion layer (14) is disposed between an end portion of the piezoelectric film (13) and the first electrode (11).</p> |
