| 发明名称 |
SUBSTRATE TREATING APPARATUS, DRIVE ASSEMBLY, AND DRIVE MEMBER CONTROLLING METHOD |
| 摘要 |
Provided is a substrate treating apparatus. The substrate treating apparatus includes: a transfer chamber conveying a substrate; a process chamber disposed adjacent to the transfer chamber and performing a treating process o the substrate; and a drive assembly supplying a power by which a component of the transfer chamber or the process chamber operates, wherein the drive assembly includes: a cylinder connected to pipes; a piston disposed to be movable inside the cylinder and connected to the component by a drive shaft; and a pipe control unit automatically adjusting a moving speed of the piston. |
| 申请公布号 |
US2015117987(A1) |
申请公布日期 |
2015.04.30 |
| 申请号 |
US201414527936 |
申请日期 |
2014.10.30 |
| 申请人 |
Semes Co., Ltd. |
发明人 |
CHOI Jin Ho;YOO Ju Mi |
| 分类号 |
H01L21/677;B25J11/00;F04B49/20 |
主分类号 |
H01L21/677 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate treating apparatus comprising:
a transfer chamber conveying a substrate; a process chamber disposed adjacent to the transfer chamber and performing a treating process to the substrate; and a drive assembly supplying a power by which a component of the transfer chamber or the process chamber operates, wherein the drive assembly comprises: a cylinder connected to pipes; a piston disposed to be movable inside the cylinder and connected to the component by a drive shaft; and a pipe control unit automatically adjusting a moving speed of the piston. |
| 地址 |
Cheonan-si KR |
