| 发明名称 |
MEMS DEVICE WITH INTEGRATED TEMPERATURE STABILIZATION |
| 摘要 |
An apparatus for providing localized heating as well as protection for a vibrating MEMS device. A cap over a MEMS gyroscope includes an embedded temperature sensor and a heater. The temperature sensor is a trace made of a material with a known temperature/resistance coefficient, which loops back along itself to reduce electromagnetic interference. The heater is a resistive metal trace which also loops back along itself. The temperature sensor and the heater provide localized temperature stabilization for the MEMS gyroscope to reduce temperature drift in the MEMS gyroscope. |
| 申请公布号 |
US2015115377(A1) |
申请公布日期 |
2015.04.30 |
| 申请号 |
US201314065310 |
申请日期 |
2013.10.28 |
| 申请人 |
Teledyne Scientific & Imaging, LLC |
发明人 |
DeNatale Jeffrey F.;Stupar Philip A. |
| 分类号 |
B81B7/00;B81C1/00 |
主分类号 |
B81B7/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A cap for a MEMS device comprising:
a body having an outer surface; a first pad located on the outer surface; a second pad located on the outer surface; a first trace embedded in the outer surface and connected to the first pad; and a second trace embedded in the outer surface and connected to the second pad. |
| 地址 |
Thousand Oaks CA US |
