SENSOR USING SENSING MECHANISM HAVING COMBINED STATIC CHARGE AND FIELD EFFECT TRANSISTOR

摘要

The present invention relates to a sensor that uses a sensing mechanism having a combined static charge and a field effect transistor, the sensor including: a substrate; source and drain units formed on the substrate and separated from each other; a channel unit interposed between the source and drain units; a membrane separated from the channel unit, disposed on a top portion and displaced in response to an external signal; and a static charge member formed on a bottom surface of the membrane separately from the channel unit and generating an electric field. Accordingly, since the sensor using a sensing mechanism having a combined static charge and a field effect transistor according to an embodiment of the present invention can measure the displacement or movement of the sensor by measuring a change of the electric field of the channel unit of the field effect transistor by using a static member, the electric field can be formed so as to be proportional to an amount of charge and inversely proportional to a squared distance regardless of the intensity and distribution of an external electric field. Therefore, sensitivity is improved without being affected by an external electric field.

主权项

1. A sensor using a sensing mechanism combining an electrostatic unit and an electric field effect transistor, comprising:
a substrate; a source part and a drain part formed on the substrate and separated from each other; a channel part formed between the source part and the drain part; a membrane separated from the channel part to be positioned upwardly and reacting to an external signal to generate a displacement; and an electrostatic member formed at a lower surface of the membrane to be separated from the channel part and generating an electric field.