| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of time stabilization of the particle number in a composition containing an aqueous phosphoric acid and/or phosphate solution; and a resist residue-releasing agent composition containing the aqueous phosphoric acid and/or phosphate solution and also having a time-stabilized particle number. <P>SOLUTION: In a method of time stabilization of the particle number in a composition containing phosphoric acid and/or a phosphate used in manufacturing of a semiconductor element circuit of a liquid crystal panel and the like, maltol is contained in the aqueous phosphoric acid and/or phosphate solution. Also provided is a resist residue-releasing agent composition where time-increase in the particle number is suppressed. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
