| 摘要 |
A method of manufacturing an EL display device having a panel part is such that a constituent element of the panel part is formed through film formation in a vacuum atmosphere. After the constituent element of the panel part has been formed on a substrate in the vacuum atmosphere, the post-film-formation substrate is placed on standby during transporting the substrate from a place in the vacuum atmosphere to a place in an atomospheric-pressure atmosphere. The placing the substrate on standby includes a first intake period and a second intake period. During the first intake period, an intake gas is gradually introduced to change the atmosphere, from the first vacuum atmosphere to the second vacuum atmosphere that exhibits a lower degree of vacuum than that of the first vacuum atmosphere. During the second intake period, the intake gas is introduced to change the atmosphere, from the second vacuum atmosphere to the atmospheric-pressure atmosphere. The first period is set to be longer in time than the second period. |
| 主权项 |
1. A method of manufacturing an EL display device having a panel part, the panel part comprising: a light emitting part in which a plurality of pixels are arrayed; and a thin-film transistor array device to control light emission of the light emitting part, the method comprising the steps of
forming a constituent element of the panel part on a substrate, through film formation in a vacuum atmosphere; and placing the post-film-formation substrate on standby, after the step of forming the constituent element, during transporting the post-film-formation substrate from a place in the vacuum atmosphere to a place in an atmospheric-pressure atmosphere, wherein the step of placing the post-film-formation substrate on standby includes a first intake period and a second intake period, the first intake period being longer in time than the second intake period, the first intake period being for gradually introducing an intake gas to change a first vacuum atmosphere into a second vacuum atmosphere lower in degree of vacuum than the first vacuum atmosphere, the second intake period being for introducing the intake gas to change the second vacuum atmosphere into the atmospheric-pressure atmosphere; and a first curve exhibited in the first intake period is gentler than a curve exhibited in the second intake period, the curves being each determined by a variation in pressure of the vacuum atmosphere and a time for introducing the intake gas. |
