SUBSTRATE PROCESSING APPARATUS AND SHUTTER MEMBER

摘要

In a substrate processing apparatus of the present disclosure, a bearing member includes a decaying mechanism provided with a connecting shaft inserted therein and configured to decay radicals or ions; a first member configured to cover the decaying mechanism; and a second member disposed at the connecting shaft and provided with the connecting shaft inserted therein while being in contact with a sealing member. Further, an end of the first member and an end of the second member are connected to be engaged with each other, an invasion path is formed to allow the radicals to invade from the connected portion of the end of the first member and the end of the second member, and the invasion path is formed to be folded back in an extending direction of the connecting shaft. The sealing member is made of a material having a tensile strength larger than 12.1 MPa.

主权项

1. A substrate processing apparatus, comprising:
a chamber provided with an opening and maintained air-tightly by depressurization; a first opening/closing member configured to carry the substrate into or out of the chamber, and open or close the opening; a second opening/closing member configured to open or close the opening from the inside of the chamber; a driving unit configured to open or close the second opening/closing member; a connecting shaft configured to connect the second opening/closing member with the driving unit; and a bearing member provided in the connecting shaft and configured to block the chamber from an atmosphere and, at the same time, decay radicals or ions; wherein the bearing member includes: a decaying mechanism provided with the connecting shaft inserted therein and configured to decay the radicals or the ions; a first block type of a first member configured to cover the decaying mechanism; and a second block type of a second member disposed at the connecting shaft and provided with the connecting shaft inserted therein while being in contact with a sealing member that blocks the atmosphere, an end of the first member and an end of the second member are connected to be engaged with each other, an invasion path is formed to allow the radicals to invade from the connected portion of the end of the first member and the end of the second member, and the invasion path is formed to be folded back in an extending direction of the connecting shaft, and the sealing member is made of a material having a tensile strength larger than 12.1 MPa.