DIAPHRAGM PIEZORESISTIVE PRESSURE SENSOR

摘要

A diaphragm piezoresistive pressure sensor includes: a base member; a diaphragm including a middle portion and a surrounding portion surrounding the middle portion; a spacer disposed between and cooperating with the base member and the diaphragm to define a cavity thereamong; an inner abutment member disposed in the cavity and spaced apart from the base member by a clearance; and a piezoresistive sensor unit embedded in the diaphragm. The spacer surrounds and is spaced apart from the inner abutment member. At least one of the inner abutment member and the middle portion of the diaphragm defines a chamber therebetween.

主权项

1. A diaphragm piezoresistive pressure sensor comprising:
a base member; a diaphragm overlapping and spaced apart from said base member along a normal direction relative to said diaphragm, said diaphragm being deformable toward said base member and including a middle portion and a surrounding portion surrounding said middle portion; a spacer disposed between and cooperating with said base member and said diaphragm to define a cavity thereamong, said diaphragm overlapping an entire area of said cavity along the normal direction; an inner abutment member disposed in said cavity and spaced apart from said base member along the normal direction by a clearance, said inner abutment member being secured to said diaphragm so as to be movable with said diaphragm relative to said base member; and a piezoresistive sensor unit embedded in said surrounding portion and said middle portion of said diaphragm; wherein said spacer surrounds and is spaced apart from said inner abutment member; wherein at least one of said inner abutment member and said middle portion of said diaphragm defines a chamber therebetween; and wherein said piezoresistive sensor unit is configured to measure pressures at least in two different pressure ranges corresponding to said cavity and said chamber, respectively.