发明名称 ELECTRON MICROSCOPE
摘要 <p>In the sample-moving mechanism of a transmission electron microscope, an x-micromovement mechanism (10) is fixed onto a member (20) different from an airlock cylinder to reduce the weight of the airlock cylinder. This reduces sample (3) oscillations at low frequencies, increasing the image quality of the electron microscope.</p>
申请公布号 WO2015060049(A1) 申请公布日期 2015.04.30
申请号 WO2014JP74964 申请日期 2014.09.19
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 KIKUCHI, HIDEKI;NAITO, KOKI;SAITOU, KOUICHIROU
分类号 H01J37/20 主分类号 H01J37/20
代理机构 代理人
主权项
地址