| 摘要 |
<p>A piezoresistance sensing module according to an embodiment of the present invention comprises: a piezoresistor; a depletion layer formed on the partial area of the piezoresistor; an insulator formed to cover one side of the depletion layer and the piezoresistor; and a piezoelectric capacitor formed on the insulator, and facing the depletion layer. The piezoresistance sensing module is capable of maintaining the stiffness of a beam and improving sensitivity.</p> |
