发明名称 MULTI-BIT FERROELECTRIC MEMORY DEVICE AND METHODS OF FORMING THE SAME
摘要 Multi-bit ferroelectric memory devices and methods of forming the same are provided. One example method of forming a multi-bit ferroelectric memory device can include forming a first ferroelectric material on a first side of a via, removing a material to expose a second side of the via, and forming second ferroelectric material on the second side of the via at a different thickness compared to the first side of the via.
申请公布号 US2015117084(A1) 申请公布日期 2015.04.30
申请号 US201314068887 申请日期 2013.10.31
申请人 Micron Technology, Inc. 发明人 Karda Kamal M.;Gealy F. Daniel;Ramaswamy D.V. Nirmal;Mouli Chandra V.
分类号 H01L43/02;H01L43/12;H01L21/28;G11C11/22 主分类号 H01L43/02
代理机构 代理人
主权项 1. A method for forming a memory device, comprising: forming a first ferroelectric material on a first side of a via; removing a material to expose a second side of the via; and forming a second ferroelectric material on the second side of the via at a different thickness compared to the first side of the via.
地址 Boise ID US