发明名称 PRESSURE SENSOR AND PRESSURE DETECTION DEVICE
摘要 This pressure sensor is provided with: a fastening part; a ring-shaped oscillator supported on the fastening part by a plurality of support beams; a plurality of electrodes situated on the fastening part, and arranged at gaps in the oscillation direction of the ring-shaped oscillator; and an electret film formed on either one of the mutually facing surfaces of the ring-shaped oscillator and the electrodes.
申请公布号 WO2015060071(A1) 申请公布日期 2015.04.30
申请号 WO2014JP75921 申请日期 2014.09.29
申请人 THE UNIVERSITY OF TOKYO;KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO 发明人 FUJITA, HIROYUKI;HASHIGUCHI, GEN;MITSUYA, HIROYUKI;ASHIZAWA, HISAYUKI
分类号 G01L9/00 主分类号 G01L9/00
代理机构 代理人
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