This pressure sensor is provided with: a fastening part; a ring-shaped oscillator supported on the fastening part by a plurality of support beams; a plurality of electrodes situated on the fastening part, and arranged at gaps in the oscillation direction of the ring-shaped oscillator; and an electret film formed on either one of the mutually facing surfaces of the ring-shaped oscillator and the electrodes.
申请公布号
WO2015060071(A1)
申请公布日期
2015.04.30
申请号
WO2014JP75921
申请日期
2014.09.29
申请人
THE UNIVERSITY OF TOKYO;KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO