发明名称 GAS BARRIER LAMINATED BODY, METHOD FOR PRODUCING SAME, MEMBER FOR ELECTRONIC DEVICE, AND ELECTRONIC DEVICE
摘要 Provided is a gas barrier laminate that can be produced inexpensively as compared with the case of using an inorganic film without requiring a complex production process, and exhibits an excellent gas barrier capability and excellent flexibility, and also provided are a method for producing the gas barrier laminate, an electronic device member that includes the gas barrier laminate, and an electronic device that includes the electronic device member. A gas barrier laminate including a base and a gas barrier layer, the gas barrier layer being provided on the base, the gas barrier layer being obtained by implanting ions into an organosilicon compound thin film formed by a CVD method that utilizes an organosilicon compound as a deposition raw material, a method for producing the gas barrier laminate, an electronic device member that includes the gas barrier laminate, and an electronic device that includes the electronic device member are provided.
申请公布号 EP2692522(A4) 申请公布日期 2015.04.29
申请号 EP20120763091 申请日期 2012.02.27
申请人 LINTEC CORPORATION 发明人 NAGANAWA, SATOSHI
分类号 B32B9/00;C23C14/04;C23C16/30;C23C16/40;C23C16/42;C23C16/56;H05K5/02;H05K13/00 主分类号 B32B9/00
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