发明名称 Nano-imprint mold
摘要 Disclosed is a mold comprising a fine-structure layer including dots comprised of a plurality of convex portions or concave portions extending in the direction of from a main surface of a substrate to outside the surface, wherein the fine-structure layer forms a plurality of dot lines in which the plurality of dots is arranged with a pitch Py in a first direction in the main surface of the substrate, while the plurality of dot lines forms a plurality of dot lines arranged with a pitch Px in a second direction orthogonal to the first direction in the main surface of the substrate, one of the pitch Py and the pitch Px is a constant interval of nano-order, while the other one is an inconstant interval of nano-order, or both are inconstant intervals of nano-order, and the inconstant interval of nano-order has a variable width ´.
申请公布号 EP2866091(A1) 申请公布日期 2015.04.29
申请号 EP20140193828 申请日期 2012.08.30
申请人 ASAHI KASEI E-MATERIALS CORPORATION 发明人 YAMAGUCHI, FUJITO;KOIKE, JUN;MAEDA, MASATOSHI
分类号 G03F7/00;B29C43/46;C30B29/38;G03F7/24;H01L21/02;H01L21/027;H01L33/22 主分类号 G03F7/00
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