发明名称 |
GROUPING SPECTRAL DATA FROM POLISHING SUBSTRATES |
摘要 |
Among other things, a computer-based method is described. The method comprises receiving, by one or more computers, a plurality of measured spectra reflected from a substrate at a plurality of different positions on the substrate. The substrate comprises at least two regions having different structural features. The method also comprises performing, by the one or more computers, a clustering algorithm on the plurality of measured spectra to separate the plurality of measured spectra into a number of groups based on the spectral characteristics of the plurality of measured spectra; selecting one of the number of groups to provide a selected group having a subset of spectra from the plurality of measured spectra; and determining, in the one or more computers, at least one characterizing value for the substrate based on the subset of spectra of the selected group. |
申请公布号 |
US2015120242(A1) |
申请公布日期 |
2015.04.30 |
申请号 |
US201314063740 |
申请日期 |
2013.10.25 |
申请人 |
Applied Materials, Inc. |
发明人 |
David Jeffrey Drue;Swedek Boguslaw A. |
分类号 |
G01B11/06 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
1. A computer-based method comprising:
receiving, by one or more computers, a plurality of measured spectra reflected from a substrate at a plurality of different positions on the substrate, the substrate comprising at least two regions having different structural features; performing, by the one or more computers, a clustering algorithm on the plurality of measured spectra to separate the plurality of measured spectra into a number of groups based on the spectral characteristics of the plurality of measured spectra; selecting one of the number of groups to provide a selected group having a subset of spectra from the plurality of measured spectra; and determining, in the one or more computers, at least one characterizing value for the substrate based on the subset of spectra of the selected group. |
地址 |
Santa Clara CA US |