| 摘要 |
An improved stacker configuration for storing workpieces in a fabrication facility is disclosed, employing workpiece compartments arranged stationarily around a robot handling assembly. The robot handler can be designed with three degrees of freedom, to improve speed, throughput and minimum particle generation. In addition, the stacker storage area is stationary with the movable components are the robot assembly, thus further contributing to the cleanliness of the storage stacker. The stacker configuration can be open storage area for fast access, space saving and ease of clean air purging. The stacker configuration can provide highly dense workpiece storage, utilizing a circumferential edge gripper robot handling assembly. |
