Spin coating deposition of a thin structured layer on a substrate
摘要
The method for producing a patterned layer of first material on a surface of a substrate comprises the following successive steps: arranging a particle on the surface of the substrate; depositing a resin by spin coating on the surface of the substrate so as to form the patterned layer of first material and a hole passing through the layer of first material and opening onto the particle; the material of the particle and the resin being chosen such that the particle exerts a repulsive interaction with respect to the resin.
申请公布号
EP2832683(A3)
申请公布日期
2015.04.29
申请号
EP20140178971
申请日期
2014.07.29
申请人
COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES