发明名称 |
ARC-TYPE EVAPORATION SOURCE |
摘要 |
<p>Provided is an arc evaporation source equipped with a target, a ring-shaped magnetic field guide magnet and a back side magnetic field generation source. The magnetic field guide magnet is aligned in a direction perpendicular to the evaporation face of the target and has a polarity that is the magnetization direction facing forward or backward. The back side magnetic field generation source is disposed at the rear of the magnetic field guide magnet, which is at the side of the back side of the target, and forms magnetic force lines running in the direction of magnetization of the magnetic field guide magnet. The target is disposed such that the evaporation face is positioned in front of the magnetic field guide magnet.</p> |
申请公布号 |
EP2865783(A1) |
申请公布日期 |
2015.04.29 |
申请号 |
EP20130806135 |
申请日期 |
2013.06.11 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.) |
发明人 |
TANIFUJI, SHINICHI;YAMAMOTO, KENJI |
分类号 |
C23C14/32;C23C14/24;H01J37/32;H01J37/34 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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