| 摘要 |
A roller-type depressing device, an imprint device and an imprint method utilizing the same which can depress an object like a die or a molding target by controlling the depressing force of a roller is provided. A roller-type depressing device to depress the object with a roller 38 includes a pressure adjusting plate 332 provided with the roller 38, a roller moving unit moving the roller 38 relative to the object, a pressure adjusting unit holding the pressure adjusting plate 332 in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate 332 acts on the roller 38, a pressure receiving stage 322 receiving the pressure of the roller 38 via the object, and a pressure adjuster adjusting the pressure difference in fluid applied to both faces of the pressure adjusting plate 332. |
