| 摘要 |
<p>A sensor element (4) comprising a diaphragm (6), a first electrically insulating layer (7), a constraining layer (8), and a sensor layer (10), said sensor layer comprising one or more sensing components, forming a layered structure. The first electrically insulating layer (7) is arranged between the diaphragm (6) and the constraining layer (8), and the constraining layer (8) is arranged between the first electrically insulating layer (7) and the sensing components (10). The first electrically insulating layer (7) is made from a material which has a Young's modulus which is significantly lower than a Young's modulus of the material of the diaphragm (6), and which is significantly lower than a Young's modulus of the material of the constraining layer (8). Thereby relaxation of strain in the first electrically insulating layer (7) is constrained, and signal drift of the sensor element (4) is minimised.</p> |
