SENSOR WITH A VIBRATING MEMBER IN A CAVITY, WITH INTEGRATED ANOMALY DETECTION

摘要

The invention relates to vibrating micro-systems, and notably but not exclusively to pressure, acceleration, or angular speed micro-sensors with a resonator in an evacuated cavity. The resonator (10) with a vibrating element is placed in an oscillating circuit controlled by a closed-loop control, the oscillating circuit supplying an oscillating signal y(t) at a resonance frequency Fp representing the measurement of a physical quantity. The resonance frequency is calculated by counting pulses over a time window. The sensor furthermore comprises means for calculating a continuity parameter Pc representing the variations in the result of the calculation of the resonance frequency over the course of the successive time windows, and means for comparing the parameter Pc with a threshold in order to deduce from this information on the degradation of the precision of the sensor.