发明名称 SCALABLE CONSTRUCTION FOR LATERAL SEMICONDUCTOR COMPONENTS HAVING HIGH CURRENT-CARRYING CAPACITY
摘要 <p>The invention relates to semiconductor components, in particular to a scalable construction for lateral semiconductor components having high current-carrying capacity. A transistor cell according to the invention comprises a control electrode (203), a plurality of source fields (201) and a plurality of drain fields (202). The control electrode completely encloses at least one of the source fields or drain fields. A transistor according to the invention comprises a plurality of transistor cells on a substrate, each of which comprises a source contact field (206) and/or a drain contact field (207). The source contact fields are conductively connected to each other on the other side of the substrate and the drain contact fields are likewise conductively connected to each other on the other side of the substrate. The method according to the invention for producing a transistor comprises the following steps: providing a substrate; forming a plurality of transistor cells on the substrate, each of which comprises a control electrode, a plurality of source fields and a plurality of drain fields; conductively connecting the control electrodes to each other; forming a source contact field and/or a drain contact field in each transistor cell; conductively connecting the source contact fields of each transistor cell to a source contact field; conductively connecting the drain fields of each transistor cell to a drain contact field; forming at least one bump (208) on each of the source contact fields and on each of the drain contact fields; providing a circuit board; conductively connecting the bumps of the source contact fields to each other by means of conductive tracks on the circuit board; and conductively connecting the bumps of the drain contact fields to each other by means of conductive tracks on the circuit board. The arrangement of the bumps and the conductive tracks on the circuit board makes a low semiconductor surface assignment by wiring possible. The arrangement according to the invention of the source fields, drain fields and control electrodes relative to the bumps makes a low heat resistance possible between the active transistor regions and the bumps.</p>
申请公布号 EP2534685(B1) 申请公布日期 2015.04.29
申请号 EP20110706194 申请日期 2011.02.10
申请人 FORSCHUNGSVERBUND BERLIN E.V. 发明人 HILT, OLIVER;WUERFL, HANS-JOACHIM
分类号 H01L23/482;H01L29/423 主分类号 H01L23/482
代理机构 代理人
主权项
地址