发明名称 A method of forming a coating layer of a semiconductor device and a method of manufacturing a semiconductor device and semiconductor devices
摘要 <p>The present invention relates to a method of forming a coating layer of a semiconductor device, a semiconductor device and a method of manufacturing the same. Specifically, since the photoresist is applied after removing the moisture remaining on a wafer as a pretreatment of coating, the present invention has an advantage of improving the adhesiveness of the photoresist, easily adjusting the desired thickness of the photoresist and reducing the application amount of the photoresist.</p>
申请公布号 KR20150045813(A) 申请公布日期 2015.04.29
申请号 KR20130125538 申请日期 2013.10.21
申请人 发明人
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
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