Method of producing optical MEMS

摘要

A method and apparatus for constructing MEMS devices is provided which employs a low cost molded housing that simultaneously provides precise and accurate alignment, mechanical protection, electrical connections and structural integrity for mounting optical and MEMS components. The package includes a MEMS die mounting surface, an optical component mounting surface and an optical imaging window monolithically fabricated with the MEMS die mounting surface in a predetermined orientation for providing alignment between the MEMS die and optical components. A MEMS adaptor plate is provided to facilitate connections of a MEMS die to external components.

主权项

1. A micro-electromechanical system (MEMS) package, comprising:
a single piece base structure; a first surface of the single piece base structure defining a MEMS die mounting surface in said single piece base structure; a second surface of the single piece base structure defining an optical component mounting surface in said single piece base structure, said optical component mounting surface and said MEMS die mounting surface positioned in an out of plane angular orientation with respect to one another, said out of plane angular orientation providing alignment between a MEMS die and an optical component mounted on said respective mounting surfaces; a cavity in said single piece base structure between said MEMS die mounting surface and said optical component mounting surface; and at least one optical imaging window, wherein said optical imaging window is monolithically fabricated with said package.