发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device according an aspect of the present disclosure may include an isolation layer formed within a substrate and formed to define an active region, a junction formed in the active region, well regions formed under the isolation layer, and a plug embedded within the substrate between the junction and the well regions and formed extend to a greater depth than the well regions.
申请公布号 US9018702(B2) 申请公布日期 2015.04.28
申请号 US201414474363 申请日期 2014.09.02
申请人 SK Hynix Inc. 发明人 Shin Wan Cheul
分类号 H01L29/66;H01L21/8238;H01L21/265;H01L29/10;H01L21/762;H01L21/768 主分类号 H01L29/66
代理机构 William Park & Associates Ltd. 代理人 William Park & Associates Ltd.
主权项 1. A method of manufacturing a semiconductor device, comprising: forming well regions within a substrate; forming an isolation layer, defining an active region, within the substrate in which the well regions are formed; forming a junction in the active region; and forming a plug embedded within the substrate between the junction and the well regions and formed to extend to a greater depth than the well regions so that the plug compensates a concentration of the well regions and forms a depletion layer barrier between the junction and the well regions, wherein the plug is formed of a conductive layer having a P type.
地址 Gyeonggi-do KR