发明名称 |
Semiconductor device and method of manufacturing the same |
摘要 |
A semiconductor device according an aspect of the present disclosure may include an isolation layer formed within a substrate and formed to define an active region, a junction formed in the active region, well regions formed under the isolation layer, and a plug embedded within the substrate between the junction and the well regions and formed extend to a greater depth than the well regions. |
申请公布号 |
US9018702(B2) |
申请公布日期 |
2015.04.28 |
申请号 |
US201414474363 |
申请日期 |
2014.09.02 |
申请人 |
SK Hynix Inc. |
发明人 |
Shin Wan Cheul |
分类号 |
H01L29/66;H01L21/8238;H01L21/265;H01L29/10;H01L21/762;H01L21/768 |
主分类号 |
H01L29/66 |
代理机构 |
William Park & Associates Ltd. |
代理人 |
William Park & Associates Ltd. |
主权项 |
1. A method of manufacturing a semiconductor device, comprising:
forming well regions within a substrate; forming an isolation layer, defining an active region, within the substrate in which the well regions are formed; forming a junction in the active region; and forming a plug embedded within the substrate between the junction and the well regions and formed to extend to a greater depth than the well regions so that the plug compensates a concentration of the well regions and forms a depletion layer barrier between the junction and the well regions, wherein the plug is formed of a conductive layer having a P type. |
地址 |
Gyeonggi-do KR |