发明名称 APPARATUS FOR PICKING UP A DIE
摘要 <p>An apparatus to pick up a die includes: an air injection unit; and a die pick up unit. The air injection unit includes a vacuum plate coupled to a lower portion of a porous plate to form a vacuum space in the porous plate and between the plates, and closely attaches to a lower surface of the porous plate corresponding to one of the dies in the vacuum space, injecting air to one of the die in a die chucking unit wherein a plurality of dies evenly arranged on the porous plate corresponding to the vacuum space are absorbed by a vacuum pressure provided to the vacuum space. The die pick up unit picks up one of the die from the upper portion when the air injection unit injects air to one of the die.</p>
申请公布号 KR101515752(B1) 申请公布日期 2015.04.28
申请号 KR20140032063 申请日期 2014.03.19
申请人 SEMES CO., LTD. 发明人 KIM, BYUNG GEUN
分类号 H01L21/683;B23Q3/08;H01L21/677 主分类号 H01L21/683
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