Spatial light modulator with integrated optical compensation structure

摘要

A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.

主权项

1. A spatial light modulator, comprising:
a substrate; a plurality of individually addressable interferometric light-modulating elements configured to modulate light transmitted through the substrate, the interferometric light-modulating elements including a movable reflective layer; and a plurality of optical compensation structures between the substrate and the plurality of individually addressable interferometric light-modulating elements, at least one of the optical compensation structures including a diffuser.