Sample holder for electricity-detection electron spin resonance device

摘要

A sample holder structure is provided with which it is possible to reduce current noise derived from electromagnetic induction, etc. in electricity-detection electron spin resonance spectroscopy. Also provided is a process for producing the structure. The material of the sample holder, which is used in an electricity-detection electron spin resonance device, is an FR-4 resin, alumina, glass, or Teflon. The sample holder has four wiring leads formed on the surface thereof. The four wiring leads each has a three-layer structure composed of a nickel layer, a gold layer, and a resist layer which have been arranged in the order from the sample holder surface, and the sample holder has the shape of the letter T. The sample holder has, formed in the end thereof, a gold pad for affixing a sample, and the gold pad has a multilayer structure composed of a nickel layer and a gold layer arranged in this order from the sample holder surface. In the T-shaped head part of the sample holder, the four wiring leads are spaced wider from each other.

主权项

1. A sample holder for an electricity-detection electron spin resonance device for irradiating microwave and magnetic field intensity on and applying a voltage to a sample having an insulating film formed between a lower electrode and an upper electrode to thereby detect defects in the insulating film comprising:
a sample holder substrate; wirings formed on the sample holder substrate; a pad connected to the wirings for connecting the lower electrode thereon; and a conductor connected to the wirings for connecting to the upper electrode.