| 发明名称 | NEMS comprising AlSi alloy based transducer | ||
| 摘要 | A nano electro-mechanical system (NEMS) formed on a substrate is provided including at least one fixed part associated with the substrate and at least one movable part in relation to the substrate, the system including a transduction component configured to excite the movable part to confer on it a movement and/or to detect a movement of the movable part, the transduction component including at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, the deposition being supported at least in part by the movable part of the system. | ||
| 申请公布号 | US9016125(B2) | 申请公布日期 | 2015.04.28 |
| 申请号 | US201013384474 | 申请日期 | 2010.07.13 |
| 申请人 | Commissariat à l'énergie et aux énergies alternatives;California Institute of Technology | 发明人 | Andreucci Philippe;Duraffourg Laurent;Marcoux Carine;Brianceau Pierre;Hentz Sebastien;Minoret Stephane;Myers Edward;Roukes Michael |
| 分类号 | G01P15/10;G01P15/097;B81B3/00;G01N29/02;G01P15/12 | 主分类号 | G01P15/10 |
| 代理机构 | Oblon, McClelland, Maier & Neustadt, L.L.P. | 代理人 | Oblon, McClelland, Maier & Neustadt, L.L.P. |
| 主权项 | 1. A nano electro-mechanical system (NEMS), comprising: a fixed part associated with a substrate; a moveable part, moveable in relation to the substrate; and a transduction component comprising an electrically conductive material, which comprises an AlSi alloy based deposition, wherein the transduction component is configured to excite the movable part to move the moveable part, to detect a movement of the movable part, or both, and wherein the AlSi alloy based deposition is supported at least in part by the movable part and forms two overlapping current loops, one configured to excite the movable part and the other configured to detect movement of the movable part. | ||
| 地址 | Paris FR | ||