Magnetic sensor and method of manufacture thereof

摘要

A magnetic sensor and a manufacturing method thereof are provided. The magnetic sensor includes: a substrate comprising a plurality of Hall elements, a protective layer formed on the substrate, a base layer formed on the protective layer, and an integrated magnetic concentrator (IMC) formed on the base layer and comprising a surface with an elevated portion. The base layer has a larger cross-sectional area than the IMC.

主权项

1. A method for manufacturing a magnetic sensor, the method comprising:
obtaining a substrate comprising a plurality of Hall elements; forming a protective layer on the substrate; forming a first buffer layer on the protective layer; forming a second buffer layer on the first elevation layer; forming a base layer comprising a surface with an elevated portion corresponding to the second buffer layer; and forming an integrated magnetic concentrator (IMC) comprising a surface with an elevated portion on the base layer, wherein the base layer has a larger area than the IMC.