Mask holding device capable of changing magnetic means and deposition equipment using the same

摘要

A mask holding device has a replaceable magnetic means, and a deposition apparatus for an organic light emitting device includes the mask holding device. The mask holding device is provided with magnets, and the magnets can be replaced as required so as to change the magnetic force of the mask holding device.

主权项

1. A mask holding device, comprising:
a substrate holder for holding a substrate; and magnetic means insertable into the substrate holder for providing a magnetic force; wherein the substrate holder is formed in a flat panel shape having an interior hollow space to receive and hold the magnetic means, an opening being formed in at least one of lateral sides of the substrate holder, the opening leading to the interior hollow space; wherein the magnetic means comprises a cassette formed with grooves for disposing magnets therein, the magnets being disposed in the grooves of the cassette; and wherein the magnetic means is insertable into the interior hollow space from the opening of the substrate holder and is thereby detachably disposed in the substrate holder.