MANUFACTURING METHOD OF GALLIUM OXIDE NANO PARTICLE USING DIETHYLENE GLYCOL AND GALLIUM OXIDE THEREFROM

摘要

The present invention relates to a method for manufacturing gallium oxide nanoparticles using an organic solvent and to gallium oxide manufactured therefrom, which include the following steps: a) a step in which solution is produced by gallium compound mixed with diethylene glycol; b) a step in which pH control agent is mixed in the solution, and c) a step in which the solution produced in step b) is laid for allowing ripening reaction to occur. The method for manufacturing gallium oxide nanoparticles according to the present invention has the following merits: the method enables manufacturing of gallium oxide having the average grain diameter of 1 to 300 nm, manufacturing whereof is difficult with the conventional wet precipitation method, because the present invention uses an organic solvent of specific types and a specific mixing ratio; and the primary crushing process is not required in manufacturing semiconductors because the particle size is similar to that of other metal oxides; and mixing of impurities can be minimized. Therefore, it is expected that the gallium oxide manufactured with the present invention will be much utilized as a material of oxide semiconductors.