Automating storage, retrieval, and routine for process flow

摘要

In some embodiments, an automated storage and retrieval system (ASRS) for storing workpieces includes a main body, a robotic arm mechanism and at least one first station. The workpiece comprises a first container configured to hold at least one article. The main body includes at least one side wall configured to confine a storage space for the workpieces in at least one first direction parallel to a floor. The robotic arm mechanism is configured to reach the storage space, the storage space being further confined by the robotic arm mechanism in at least one second direction opposite to the at least one first direction. The at least one first station is configured with at least one first accessing port located within the storage space, and configured for the ASRS to perform a routine for a process flow.

主权项

1. An automated storage and retrieval system (ASRS) for storing workpieces, wherein the workpiece comprises a first container configured to hold at least one article, the ASRS comprising:
a main body comprising at least one side wall configured to confine a storage space for the workpieces in at least one first direction parallel to a floor; a robotic arm mechanism configured to reach the storage space, the storage space being further confined by the robotic arm mechanism in at least one second direction opposite to the at least one first direction; at least one first station, the first station configured with at least one first accessing port located within the storage space, and configured for the ASRS to perform a routine for a process flow, wherein the at least one first station is configured for the ASRS to perform a metrology or inspection routine for a process flow; and a second station, configured with at least one second accessing port located within the storage space, and configured to extract some of articles from a first workpiece to a second workpiece, wherein the robotic arm mechanism is configured to move the second workpiece from the second station to the first station, and/or move the first workpiece from the first station to the second station.