Coupling transfer system

摘要

In a transfer system for wafers, etc., a coupling chamber corresponding to a port is formed only when a transfer box comes in tight contact with an apparatus as a transfer target in the transfer box is transferred into the apparatus, so that the transfer target will be transferred together with the coupling chamber into the apparatus by means of magnetic attraction forces exerted between the transfer box, transfer box door and apparatus door, thereby simplifying the structures of the transfer box and apparatus and also allowing the transfer target to be transferred into the apparatus without fail.

主权项

1. A coupling system comprising:
a transfer box; and an apparatus having an apparatus body and an apparatus door with magnets; said coupling system having structures wherein: the transfer box has a first sealing structure hermetically sealable by means of tight coupling of a transfer box body and a transfer box door; the apparatus has a second sealing structure hermetically sealable by means of tight coupling of the apparatus body and apparatus door; the transfer box and apparatus have a third sealing structure hermetically sealable by means of tight coupling of both; only when the transfer box and apparatus are tightly coupled, one undivided coupling chamber is formed hermetically by the third sealing structure, and the transfer box door is separated from the transfer box and taken into the apparatus; the transfer box body and transfer box door have magnets and magnetic bodies, respectively, so that the transfer box door and transfer box are closed by means of magnetic forces exerted between the magnets and magnetic bodies, and when they are closed, the magnet and each magnetic body on the transfer box body and transfer box door form a magnetic closed circuit; and the transfer box door is attracted to the apparatus door by means of magnetic forces of the magnets on the apparatus door in order to open the transfer box door.