Substrate bonding apparatus

摘要

Provided is a substrate holding unit that holds a pair of substrates that are aligned and layered, comprising a first holding member that holds one of the substrates; a plurality of members to be joined that are connected to the first holding member; a second holding member that holds the other of the substrates to face the one of the substrates; a plurality of joining members that exert an adhesion force on the members to be joined and are connected to the second holding member at positions corresponding to positions of the members to be joined; and an adhesion restricting section that restricts the adhesion force until the substrates are aligned.

主权项

1. A substrate bonding apparatus that aligns and layers a pair of substrates held, respectively, by a first holding member and a second holding member so as to face each other, the substrate bonding apparatus comprising:
a driving section that moves the first holding member and the second holding member relative to each other; and a restricting section that, during the moving performed by the driving section, restricts a joining force that joins the first holding member and the second holding member to each other, the joining force being exerted, by a magnet connected to one of the first and the second holding members, on a magnetic component connected to the other of the first and the second holding members, wherein one of the magnet and the magnetic component is connected to its respective holding member so as to be movable away from its respective holding member in the direction of the joining force, and the restricting section includes means for sucking the one of the magnet and the magnetic component toward its respective holding member.