Method of fabricating a nozzle plate of a spray apparatus

摘要

A method of manufacturing a nozzle plate of a spray apparatus is provided. The method includes providing a conductive layer; forming a plurality of insulating layers on the conductive layer, wherein each of the insulating layers has at least one first tapered geometrical structure with mirror symmetry and a centroid with positional deviation from a first pattern center, and wherein the centroid of the first tapered geometrical structure is a barycenter of the first tapered geometrical structure; forming an electroplating layer on the conductive layer and part of the insulating layer, leaving the central part of the insulating layer exposed; and removing the conductive layer and the insulating layer to form a main body resulting in a plurality of orifices each having an inlet end and an outlet end on the electroplating layer.

主权项

1. A method of manufacturing a nozzle plate of a spray apparatus, comprising the steps of:
providing a conductive layer; forming a plurality of insulating layers on the conductive layer, wherein each of the insulating layers has at least one first planar-tapered geometrical structure with mirror symmetry and a centroid with positional deviation from a first pattern center, wherein the centroid of the first planar-tapered geometrical structure is a barycenter (center of mass) of the first planar-tapered geometrical structure, and the first pattern center is a center of a circle circumscribed about the first planar-tapered geometrical structure; forming an electroplating layer on the conductive layer and part of insulating layers, leaving the central part of insulating layers exposed; and removing the conductive layer and the insulating layers to form a main body resulting in a plurality of orifices each having an inlet end and an outlet end on the electroplating layer, wherein the inlet end and the outlet end are triangular on surfaces of the electroplating layer and the paired inlet end and outlet end have a second geometrical structure with mirror symmetry; and wherein a second pattern center of the second geometrical structure is a center of a circle circumscribed about the second geometrical structure.