VIBRATOR, MANUFACTURING METHOD OF THE SAME, ELECTRONIC DEVICE, ELECTRONIC APPARATUS AND MOVABLE BODY

摘要

PROBLEM TO BE SOLVED: To obtain a vibrator for physical quantity detection which prevents scattering and diffusion of sealant from adhering to a vibration element when a through hole for deaerating inside a cavity so as to cause the vibration element to stably operate is sealed.SOLUTION: A vibrator comprises: a substrate; a lid body; and a function element which is constituted of the substrate and the lid body and is accommodated inside a cavity. The lid body comprises: a sealing hole passing through the lid body; and a sealing member for hermetically sealing the sealing hole. The function element is provided with a diffusion material shield section provided with a reception opening region overlapping with at least a part of a first opening region of the sealing hole on a cavity side surface of the lid body as viewed in a plan view of the function element and the lid body.