| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for double side film deposition, which prevents blocking phenomena that metal films stick together, when a long body is rolled in immediately after metal films are deposited on both faces.SOLUTION: The method for double side deposition, which deposits a metal film on both sides of a long body transported by roll-to-roll in low pressure atmosphere, includes: a first deposition step of depositing a metal film on one face of the long body by a first sputtering means; a second deposition step of depositing a metal film on the other face of the long body by a second sputtering means; and a third deposition step of forming a blocking prevention layer composed of a metal oxide film or a metal nitride film on the metal film by an atomic layer deposition (ALD) method; and a rolling step of rolling the long body on which the blocking prevention layer is formed, and rolling it in a take-up reel. The first deposition step, the second deposition step and the third deposition step are contiguously performed. |
