| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray fluorescence analyzer that improves a heat efficiency of the apparatus to reduce power consumption.SOLUTION: An X-ray fluorescence analyzer comprises: an X-ray tube 1; a spectrometer 3 for measuring a wavelength of a fluorescent X-ray; a cooling mechanism (a double pipe cooler 9, a cooling water circulation device 10) for cooling the X-ray tube 1; and a temperature adjustment mechanism for maintaining the temperature of the spectrometer 3 to be constant. The X-ray fluorescence analyzer is provided with a piping system (a pipeline 22, an electric motor valve 23) and control means for using part of waste heat released from the cooling mechanism of the X-ray tube 1 as a heat source of the temperature adjustment mechanism for maintaining the temperature of the spectrometer 3 to be constant, whereby the heat efficiency of the whole apparatus is improved to reduce the power consumption.</p> |
