| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing device having a holding table which is not broken even when laser beam in an infrared light region is radiated thereto.SOLUTION: The laser processing device comprises: holding means for holding a workpiece; laser beam radiation means for radiating laser beam in an infrared light region to the workpiece held by the holding means; and processing feed means for moving the holding means and the laser beam radiation means relatively in the processing feed direction. The holding means has a holding table for holding the workpiece on an upper surface, and a table base for supporting the holding table, and the holding table is formed of silicon. |
