摘要 |
PROBLEM TO BE SOLVED: To effectively exhibit treatment performance of an electric deionized water production device in a pure water production apparatus formed by combining RO membrane separation devices, a decarbonation device, and the electric deionized water production device.SOLUTION: A pure water production apparatus 1, which produces pure water by sequential treatment of water to be treated, includes a plurality of reverse osmosis membrane separation devices 2, 4, a decarbonation device 3, and an electric deionized water production device 10. The plurality of reverse osmosis membrane separation devices 2, 4 comprises a first reverse osmosis membrane separation device 2 and a second reverse osmosis membrane separation device 4. The decarbonation device 3 is serially connected to the first and second reverse osmosis membrane separation devices 2, 4 between them. The electric deionized water production device 10 is connected to the downstream side of the plurality of reverse osmosis membrane separation devices 2, 4 with respect to the flow direction of the water to be treated. |