TRAP DEVICE AND SUBSTRATE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a trap device which efficiently removes a reaction product contained in a gas flow.SOLUTION: A trap device comprises: a first cylindrical member having a space; a second cylindrical member being detachably disposed in the space and having an upstream side opening to flow a gas in and a downstream side opening to flow out the gas flowing in from the upstream side opening; a downstream side trap member disposed so as to close the downstream side opening at the inside of the second cylindrical member; and an upstream side trap member being disposed between the downstream side trap member and the upstream side opening of the second cylindrical member and having a recess recessing in a direction adjacent to the downstream side trap member.