| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type sensor that performs control for shifting the initial position of a movable electrode with respect to the initial position of a fixed electrode and can accurately shift the movable electrode to the initial position.SOLUTION: In the sensor 10, a drive electrode 27 for shifting the position in the Z direction of a main body part 31 including a movable electrode 36 is disposed on a substrate 12. In a movable part 11, when a drive voltage is applied between the drive electrode 27 and a weight part 32, the relative position of the movable electrode 36 to the fixed electrode 25 in the Z direction is shifted by the electrostatic force. Then, the initial position of the movable part 11 shifted by the electrostatic force becomes a position at which the movement of the weight part 32 is regulated by a stopper 29 disposed on the substrate 12. |
