| 摘要 |
FIELD: measurement equipment.SUBSTANCE: device relates to the field of measurement equipment, in particular, to mass spectrum analyser, and may be used to study substance structure, surface of solid bodies and processes of interaction as particles collide in gases and plasma. The technical result is higher accuracy of measurement of mass composition of ion flux and lower distortion in measurements due to elimination of edge effects present in usage of permanent magnets. In the device there is an analyser, which serves as a separator of arriving particles of the ion flux by speeds and comprises two cylindrical electrodes placed coaxially, with an electromagnetic winding that covers them, which provides a combination of electric and magnetic fields with orthogonal orientation of their intensities. Further in the mass spectrometer there is an electrostatic analyser along with direction of ion flux propagation, and such analyser separates the flow of particles arriving into it with the same speed according to the value of energy ratio to the charge and serves as a separator by masses. Besides, the device is equipped with generators of voltage pulses of complex shape to control voltage of outer and inner cylindrical electrodes, and also to control electromagnetic winding of the separator by speeds and electrodes of the separator by masses.EFFECT: capability is implemented to perform measurements of ion propagation functions with high resolving capacity by speeds for each determined mass, which provides for high accuracy of measurement of ion flux mass composition.6 dwg |
