MEASUREMENT METHOD FOR VIBRATION DISPLACEMENT USING STATE VARIATION PRINCIPLE

摘要

Provided by the present invention is a vibration displacement measuring method using a state variational principle. The vibration displacement measuring method using a state variational principle is able to: improve the degree of precision up to a picometer level in comparison with existing methods; remarkably save the capacity of a memory necessary for a measurement and various calculations in comparison with the existing methods; and be performed in real time by using a high speed DSP or FPGA. To achieve the purposes described above, the vibration displacement measuring method using a state variational principle of the present invention includes the following steps of: overlapping a measuring laser beam reflected from a calibrated subject which generates rotational vibrations and a reference laser beam reflected from a fixed reference plane and receiving the laser beams to an optical sensor; and calculating the vibration displacement of the calibrated subject by using an electrical output signal outputted from the optical sensor.