ADJUSTABLE SPATIAL FILTER FOR LASER SCRIBING APPARATUS

摘要

The present invention relates to a scribing device for flat semiconductor substrates in a radiating fashion along the scribe lane extended from rows opposite to semiconductor devices on the target plane of the substrate. The scribe lane has a length parallel to a first direction and a width parallel to a second direction. The first and second directions are located parallel to the X-axis and Y-axis on the orthogonal coordinates system, which consists of a substrate holder to hold the substrate; a light projector to generate adjustable arrays of optical beams; a projection system to connect with the optical beams on the target plane of the usbstrate when it is held on the substrate holder; and the actuator system to generate relative displacements of the substrate holder for the optical beams parallel to the XY plane. The present invention also includes an adjustable spatial filter located between the light projector and the substrate holder which again includes a multiple number of power plates, whose locations can be controlled in ways to block selectable optical beams on the arrays at least partially.