发明名称 CATHODE ELECTRIC PLATE ASSEMBLY
摘要 Disclosed is a cathode electric plate assembly. The cathode electric plate assembly according to one embodiment of the present invention comprises: a cathode electric plate in which a combining hole is formed in a gas passing part in which multiple gas barrels and holes are formed, and a protrusion downwards protruded on an upper surface separated to the outside of a circumferential direction of the gas passing part; a combining member combined with the combining hole; and a cathode ring mounted on an upper surface of the protrusion.
申请公布号 KR101514420(B1) 申请公布日期 2015.04.24
申请号 KR20130158722 申请日期 2013.12.18
申请人 HANA SILICON, INC. 发明人 PARK, JIN KYOUNG;KIM, YONG UK
分类号 H05H1/34 主分类号 H05H1/34
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