发明名称 |
CATHODE ELECTRIC PLATE ASSEMBLY |
摘要 |
Disclosed is a cathode electric plate assembly. The cathode electric plate assembly according to one embodiment of the present invention comprises: a cathode electric plate in which a combining hole is formed in a gas passing part in which multiple gas barrels and holes are formed, and a protrusion downwards protruded on an upper surface separated to the outside of a circumferential direction of the gas passing part; a combining member combined with the combining hole; and a cathode ring mounted on an upper surface of the protrusion. |
申请公布号 |
KR101514420(B1) |
申请公布日期 |
2015.04.24 |
申请号 |
KR20130158722 |
申请日期 |
2013.12.18 |
申请人 |
HANA SILICON, INC. |
发明人 |
PARK, JIN KYOUNG;KIM, YONG UK |
分类号 |
H05H1/34 |
主分类号 |
H05H1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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