| 摘要 |
<p>An ultrasonic cleaning apparatus for suppressing reflected waves comprises: a housing whose lower side faces an article to be cleaned, and having a coolant inlet for receiving a coolant and a coolant outlet for discharging the coolant; and a vibrator having a first carrier stored inside the housing, a piezoelectric element installed on an upper side of the first carrier for generating an ultrasonic wave, a second carrier whose upper side is tightly mounted on a lower side of the housing and attached to a lower side of the first carrier, and being cooled by the coolant flowing inside the housing; wherein an inclined surface is formed on a lower side of the second carrier. In addition, an ultrasonic cleaning system for suppressing reflected waves according to the present invention comprises: the ultrasonic cleaning apparatus for suppressing reflected waves; and a cleaning solution supply means for supplying a cleaning solution to the article.</p> |
