发明名称 ELASTIC SUPPORT PLATE, BREAKING APPARATUS AND DIVIDING METHOD
摘要 <p>The present invention has a subject of breaking along a brake line a resin layer of a complex substrate whose substrate part is broken preliminarily as a complex substrate wherein a resin layer is coated on a substrate having a number of functional areas formed with an alignment in vertical and horizontal directions. To this end, the present invention is configured to dispose a complex substrate (10) on an elastic support plate (40). The elastic support plate (40) has a frame shape part (42) which is slightly greater than surrounding complex substrates. By installing the frame shape part (42), the frame shape part (42) is indented even for the most distant circumference chip alike different chips and the elastic support plate (40) is deformed, whereby breaking may be performed.</p>
申请公布号 KR20150044369(A) 申请公布日期 2015.04.24
申请号 KR20140073642 申请日期 2014.06.17
申请人 发明人
分类号 H01L21/301;H01L21/76 主分类号 H01L21/301
代理机构 代理人
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